Energy (eV),SF5+ [10-16 cm2],±5%,SF4+ [10-17 cm2],±5%,SF3+ [10-17 cm2],±5%,SF2+ [10-17 cm2],±5%,(SF+ + SF4++)[10-17 cm2],±5%,S+ [10-17 cm2],±8%,F+ [10-17 cm2],±5%,SF3++ [10-18 cm2],±12%,SF2++ [10-17 cm2],±15%,SF++ [10-18 cm2],±12%,"(SF3+, F+) [10-18 cm2]",±30%,"(SF2+, F+) [10-18 cm2]",±25%,"(SF+, F+) [10-18 cm2]",±20%,"(S+, F+) [10-17 cm2]",±10%
18,0.06,0.02,,,,,,,,,,,,,,,,,,,,,,,,,,
20,0.19,0.03,,,,,,,,,,,,,,,,,,,,,,,,,,
22.5,0.46,0.02,0.13,0.07,0.12,0.06,,,,,,,,,,,,,,,,,,,,,,
25,0.86,0.04,0.26,0.08,0.56,0.07,,,,,,,,,,,,,,,,,,,,,,
27.5,1.18,0.06,0.42,0.05,1.17,0.12,,,,,,,,,,,,,,,,,,,,,,
30,1.47,0.07,0.69,0.06,2.21,0.13,,,,,,,,,,,,,,,,,,,,,,
32.5,1.84,0.09,1.11,0.07,3.43,0.17,0.22,0.02,,,,,,,,,,,,,,,,,,,,
35,2.03,0.10,1.30,0.07,4.81,0.24,0.55,0.05,,,,,,,,,,,,,,,,,,,,
40,2.36,0.12,1.67,0.08,6.23,0.31,1.21,0.06,0.52,0.03,0.11,0.01,,,,,,,,,,,,,,,,
45,2.57,0.13,1.76,0.09,5.89,0.29,1.82,0.09,1.59,0.08,0.29,0.02,,,,,,,,,,,,,,,,
50,2.74,0.14,1.97,0.10,6.76,0.34,2.27,0.11,2.75,0.14,0.70,0.06,0.49,0.02,,,,,,,,,,,,,,
60,3.01,0.15,2.27,0.11,8.08,0.40,2.79,0.14,4.03,0.20,1.51,0.12,1.34,0.07,0.32,0.10,0.15,0.05,0.35,0.07,,,,,,,0.29,0.09
70,3.12,0.16,2.52,0.13,8.69,0.43,3.02,0.15,4.89,0.24,2.11,0.17,2.39,0.12,0.73,0.19,0.32,0.09,0.52,0.09,,,,,,,0.48,0.09
80,3.23,0.16,2.67,0.13,8.92,0.45,2.94,0.15,5.30,0.27,2.54,0.20,2.94,0.15,0.89,0.18,0.53,0.13,1.11,0.17,,,,,,,0.69,0.10
90,3.23,0.16,2.68,0.13,9.26,0.46,3.08,0.15,5.94,0.30,2.88,0.23,3.96,0.20,1.19,0.18,0.72,0.16,1.41,0.17,,,,,,,0.81,0.11
100,3.34,0.17,2.86,0.14,9.71,0.49,3.14,0.16,6.34,0.32,3.32,0.27,5.01,0.25,1.33,0.16,0.88,0.18,1.75,0.21,,,3.2,1.1,,,1.00,0.13
120,3.31,0.17,2.83,0.14,9.59,0.48,2.95,0.15,6.50,0.32,3.92,0.31,6.33,0.32,1.54,0.18,1.08,0.16,2.29,0.27,6.4,2.3,4.0,0.9,7.9,1.6,1.64,0.16
140,3.34,0.17,2.89,0.14,9.79,0.49,2.95,0.15,6.49,0.32,4.17,0.33,7.32,0.37,1.72,0.21,1.19,0.18,2.71,0.32,7.9,2.7,4.0,1.0,9.7,1.9,1.83,0.18
160,3.32,0.17,2.70,0.14,9.55,0.48,2.74,0.14,6.61,0.33,4.24,0.34,7.85,0.39,1.67,0.20,1.17,0.18,2.87,0.34,8.7,2.6,3.0,0.8,7.4,1.5,2.03,0.20
200,3.23,0.16,2.67,0.13,9.35,0.47,2.66,0.13,6.27,0.31,4.31,0.34,8.45,0.42,1.54,0.18,1.24,0.19,2.87,0.34,8.5,2.6,3.2,0.8,8.7,1.7,2.18,0.22
250,3.03,0.15,2.43,0.12,8.68,0.43,2.34,0.12,5.69,0.28,3.90,0.31,8.17,0.41,1.41,0.17,1.16,0.17,2.45,0.29,8.6,2.6,3.8,1.0,7.8,1.6,2.04,0.20
300,2.93,0.15,2.38,0.12,8.17,0.41,2.18,0.11,5.17,0.26,3.71,0.30,7.62,0.38,1.39,0.17,1.08,0.16,2.00,0.24,8.0,2.4,3.4,0.9,7.2,1.4,2.11,0.21
400,2.62,0.13,2.08,0.10,7.17,0.36,1.72,0.09,4.25,0.21,3.00,0.24,6.27,0.31,1.17,0.14,0.90,0.14,1.72,0.21,6.4,1.9,3.1,0.8,6.1,1.2,1.74,0.17
500,2.42,0.12,1.99,0.10,6.60,0.33,1.54,0.08,3.83,0.19,2.63,0.21,5.38,0.27,1.04,0.12,0.78,0.12,1.39,0.17,5.7,1.7,2.3,0.6,5.1,1.0,1.50,0.15
600,2.21,0.11,1.72,0.09,5.98,0.30,1.40,0.07,3.42,0.17,2.33,0.19,4.81,0.24,0.98,0.12,0.68,0.10,1.16,0.14,5.0,1.5,2.3,0.6,5.2,1.0,1.35,0.14
800,1.86,0.09,1.46,0.07,4.93,0.25,1.13,0.06,2.67,0.13,1.73,0.14,3.72,0.19,0.72,0.09,0.51,0.08,1.02,0.12,4.8,1.4,2.0,0.5,3.2,0.6,1.01,0.10
1000,1.65,0.08,1.27,0.06,4.49,0.22,0.98,0.05,2.21,0.11,1.51,0.12,2.97,0.15,0.59,0.07,0.47,0.07,0.82,0.10,3.2,1.0,1.7,0.4,2.2,0.7,0.83,0.08