Absolute partial cross sections for electron-impact ionization of CF4 from threshold to 1000 eV

D. R. Sieglaff, R. Rejoub, B. G. Lindsay, and R. F. Stebbings.

J. Phys. B: At. Mol. Opt. Phys. 34. 799-809 (2001)

Absolute partial cross sections for electron-impact ionization of CF4 are reported for electron energies from threshold to 1000 eV. The product ions are mass analyzed using a time-of-flight mass spectrometer and detected with a position-sensitive detector whose output demonstrates that all product ions are collected with equal efficiency irrespective of their initial kinetic energies. Data are presented for the production of CF3+, CF2+, (CF+ + CF32+), C+, F+, CF22+ and for the total cross section which is obtained as the sum of these partial cross sections. The overall uncertainties in the absolute cross section values are ±5% to ±8%. Data are also presented for formation of (CF+, F+) and (CF2+, F+) ion pairs. Comparison is made with prior experiments and calculations.